At ICMOVPE XXI, Taiyo Nippon Sanso will present on “Contribution to High-Quality Semiconductor Manufacturing with Face-Down MOCVD,” Keitaro Ikejiri1, Guanxi Piao1, Kenichi Eriguchi1, Yoshihisa Koyama2, Junya Yoshinaga1, Kazutada Ikenaga1, and Shuichi Koseki1
1Taiyo Nippon Sanso Corporation, Japan; 2Taiyo Nippon Sanso CSE Ltd., Japan