MOCVD Reactors

Taiyo Nippon Sanso Corporation (TNSC) was the first in the world to develop MOCVD equipment to produce compound semiconductors utilized in LEDs, lasers, and high performance electronics. 

TNSC MOCVD reactors are highly regarded worldwide for exceptionally stable performance.  Please fill out the contact form on this page to find out more.

UR Series Reactors for Mass Production
GaN and related alloy processing for wafer diameters up to 200 mm 

SR Series Reactors for Research and Small Scale Production
GaN and related alloy processing for wafer diameters up to 150 mm

HR Series Reactors for Research and Mass Production
GaAs, InP, and related alloy processing for wafer diameters up to 200 mm

BRC/BMC Series Reactors for Research and Mass Production
GaAs, InP, and related alloy processing for wafer diameters up to 150 mm

TNSC along with its sister companies, MATHESON (U.S.) and Nippon Gases (Europe) offer complete end-to-end solutions for compound semiconductor and electronics manufacturers that include MOCVD reactors, specialty gases, gas purifiers and abatement systems.