Taiyo Nippon Sanso Corporation (TNSC) was the first company to develop and introduce commercial metal organic chemical vapor deposition (MOCVD) systems in 1983. This equipment is used to produce compound semiconductors used in such products as UVLEDs, UV lasers, and photodetectors. TNSC equipment is regarded worldwide for its exceptionally stable performance.
High aluminum content AlGaN-based UV emitters and detectors are applicable in a wide range of fields:
- UV Sterilization and Disinfection
- Analytical Chemistry
- Environmental Monitoring
- Fluorescence Detection
- Medical Instrumentation
MOCVDs with high temperature deposition capability are required for high aluminum content AlGaN films:
- TNSC’s HT (High Temperature) series MOCVD reactors offer best-in-class AlGaN crystalline quality and reproducibility
- In collaboration with partners, TNSC has produced UVLEDs operating in the UVC band using the TNSC SR4000HT MOCVD system
